AGC offers a full line of high-purity recrystallized and CVD-Coated Silicon Carbide (SiC) furnace components for Vertical, Horizontal and Single Wafer processes. AGC’s SiC materials are preferred worldwide by furnace manufacturers and wafer fabs whose processes demand the use of high-purity precision components.
With ppb purity levels and a melting point of >1400°C, AGC’s CVD-Coated SiC is the material of choice for High-Temperature and LPCVD processes. Likewise, it is virtually impervious to acid etc, resulting in consistent and repeatable performance time after time.
GC’s SiC materials are available in 150mm - 300mm for all major horizontal and vertical systems.