SiC and CMP Slurries
AGC offers a full line of high-purity recrystallized and CVD-Coated Silicon Carbide (SiC) furnace components for Vertical, Horizontal and Single Wafer processes. AGC’s SiC materials are preferred worldwide by furnace manufacturers and wafer fabs whose processes demand the use of high-purity precision components.
AGC CMP Slurry polishing technologies for planarized multi-layer structures are the latest in state-of-the-art CMP Slurry technology. AGC works closely with leading fabs to optimize slurry properties for custom processes.